Sensors and ASIC’s can each be optimized individually for performance, but to achieve the best overall system performance all factors, including the wafer fab processing, MEMS and package design, and test algorithm must be considered. This session will discuss the design and manufacturing of an ultra-low, ultra-stable pressure sensor and its tradeoffs, the ASIC and its polynomial digital correction algorithm and overall tailored test methodology. Measured data for both pressure and flow applications will be shared, showcasing the ease of tailored calibration for very demanding applications in industrial (HVAC) and medical (CPAP, ventilators).
